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NanoSIMS
application in Material: Dopant Segregation at Grain Boundary in YAG (Yttrium
Aluminum Garnet)
Cesium 16 keV, 1.5 pA, beam diameter 100
nm. High Mass Resolution.
256 x 256 pixels, acquisition time: 30
minutes.
Bulk sample, no charge compensation, gold
coating.
After thermal treatment
of the ceramic, the Silicon dopant segregates toward the grain boundaries.
Analysis and imaging of this phenomenon was impossible without the NanoSIMS
due to the simultaneous challenges of:
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Strongly insulating material (Auger
electron spectroscopy impossible).
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Low concentration (maximum about 0.1 at.%
Silicon at grain boundary): Auger/TEM impossible. The unique sensitivity
(transmission) of the NanoSIMS 50 allows trace imaging in a reasonable
time.
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Lateral resolution: the minimum beam size
on the NanoSIMS is 40 nm. It was adjusted here to 100 nm to keep the acquisition
time reasonable (beam current).
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