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Scientific Instruments
for Research
The CAMECA instruments provide elemental and isotopic composition data from micron down to sub-nanometer scale and equip the most prestigious government and university labs as well as leading high tech industrial companies around the world.
Analytical techniques include SIMS, EPMA and 3D Atom Probe, applications are most diverse: Earth & Planetary Sciences, Materials, Semiconductors, Life Sciences...
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Metrology Tools
for Semiconductor
CAMECA develops in-fab and near-fab metrology equipment based on the LEXES and SIMS analytical techniques.
Our tools have been adopted by top semiconductor manufacturers worldwide and address major thin film and new material process control issues including: elemental composition and thickness in substrates, thin or thick multilayers, ULE implants, dopant dosimetry...
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Recent news,
Upcoming events...
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New version of CAMECA's Integrated Visualization and Analysis Software (IVAS™) available. More>>
Washington University at St Louis, USA selects IMS 7f-GEO. More>>
Forschungszentrum Jülich chooses Atom Probe to support their research in solar cells and battery systems. More>>
Come and meet us at:
EMAS, Porto, Portugal, May 12-16
SIMS Workshop, Annapolis, USA, May 13-17
Full show schedule>>
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