CAMECA Logo
Worldwide contacts - Service & Support
Search


Home
AMETEK Materials Analysis Division
CAMECA Web Site
WORLD LEADER IN ELEMENTAL & ISOTOPIC MICROANALYSIS
spacer-10pix-high  
Scientific Instruments
for Research

The CAMECA instruments provide elemental and isotopic composition data from micron down to sub-nanometer scale and equip the most prestigious government and university labs as well as leading high tech industrial companies around the world.

Analytical techniques include SIMSEPMA and 3D Atom Probe, applications are most diverse: Earth & Planetary Sciences, Materials, Semiconductors, Life Sciences...

Research 
Metrology Tools
for Semiconductor

CAMECA develops in-fab and near-fab metrology equipment based on the LEXES and SIMS analytical techniques.

Our tools have been adopted by top semiconductor manufacturers worldwide and address major thin film and new material process control issues including: elemental composition and thickness in substrates, thin or thick multilayers, ULE implants, dopant dosimetry...

Semiconductor Metrology 
Thanks to all those who attended the 17th Aug. factory tour... We are now looking forward to seeing many of you at our SIMS XXI User Reception in Krakow on 12th Sep!

Apr 17: JAEA orders the first IMS 1300-HR³ confirming CAMECA's leadership in nuclear safeguards instrumentation.

APT-EKBJust released:
new 32 page Atom Probe Tomography tutorial
Download your free copy!



Jan 17: China Inst. of Atomic Energy selects SKAPHIA Shielded EPMA. More>>

Aug 16: Nu Instruments joins CAMECA
Come and meet us at: 
MS & T17, Pittsburgh, USA, 08   -  12 Oct

Materials science and technology conference.
EBTM 17, Zelonograd, Russia, 09 - 13 Oct
View full conference schedule >> 

instruments for research - metrology tools - applications - user publications - news - conferences - company - locations

Atom Probe Tomography (APT) - SIMS - EPMA - LEXES - ICP-MS - GD-MS - TIMS

© 2010-2016 AMETEK, Inc - CAMECA SAS. All Rights Reserved - www.ametek.com - www.atomprobe.com - Nu Instruments
privacy - trademarks - sitemap