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Universal Magnetic Sector SIMS for Materials Science: Semiconductors, Metals, Ceramics...
The CAMECA IMS 7f is a double-focusing magnetic sector SIMS with well established analytical performances: it combines extreme sensitivity, high mass resolution, high dynamic range and low detection limits with high analysis throughput.
The tool of choice for solving a wide range of analytical problems...
The IMS 7f offers unparalleled depth profiling capabilities with high depth resolution and high dynamic range. A high efficiency optical gate is used to eliminate crater edge effects, and the high mass resolution ensures true elemental analysis by eliminating the numerous interfering ions (31P/30SiH, 56Fe/28Si2…). The high transmission mass spectrometer is combined with two reactive, high-density ion sources, O2+ and Cs+, thus providing high sputter rate and excellent detection limits.
Thanks to a unique stigmatic optical system, the IMS 7f performs both direct ion microscopy and scanning microprobe imaging. Besides, its electron flood gun provides a unique self-compensation mode that makes it possible to measure depth profiles on complex insulating structures.
...with easy operation and high throughput
A PC-Windows automation system ensures easy use of the instrument through memorized settings and recipes. Tuning is made easy and analyses can be run in a completely automated, unattended mode with excellent repeatability over hours and days.
Improved reproducibility (sub-percent level on implant dose measurement) is also achieved thanks to automated ion beam centering routines which, by reducing tool calibration needs, also enhance its productivity.
Thanks to its high automation level and its high sputter rate capabilities (up to several microns within minutes), the CAMECA IMS 7f achieves excellent data and sample throughputs.